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Low contact resistivity of barrier height controlled PtHfSi to Si evaluated by cross-bridge Kelvin resistor

Author: OHMI Shun-ichiro
大見俊一郎
Publication venue: 'Institute of Electronics, Information and Communications Engineers (IEICE)'
Publication date: 30/07/2019
Field of study

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Low contact resistivity of barrier height controlled PtHfSi to Si evaluated by cross-bridge Kelvin resistor

Author
Publication venue: 'Institute of Electronics, Information and Communications Engineers (IEICE)'
Publication date: 01/01/2011
Field of study

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