Power-Scavenging MEMS Robots

This thesis includes the design, modeling, and testing of novel, power-scavenging, biologically inspired MEMS microrobots. Over one hundred 500-μm and 990-μm microrobots with two, four, and eight wings were designed, fabricated, characterized. These microrobots constitute the smallest documented attempt at powered flight. Each microrobot wing is comprised of downward-deflecting, laser-powered thermal actuators made of gold and polysilicon; the microrobots were fabricated in PolyMUMPs® (Polysilicon Multi-User MEMS Processes). Characterization results of the microrobots illustrate how wing-tip deflection can be maximized by optimizing the gold-topolysilicon ratio as well as the dimensions of the actuator-wings. From these results, an optimum actuator-wing configuration was identified. It also was determined that the actuator-wing configuration with maximum deflection and surface area yet minimum mass had the greatest lift-to-weight ratio. Powered testing results showed that the microrobots successfully scavenged power from a remote 660-nm laser. These microrobots also demonstrated rapid downward flapping, but none achieved flight. The results show that the microrobots were too heavy and lacked sufficient wing surface area. It was determined that a successfully flying microrobot can be achieved by adding a robust, light-weight material to the optimum actuator-wing configuration—similar to insect wings. The ultimate objective of the flying microrobot project is an autonomous, fully maneuverable flying microrobot that is capable of sensing and acting upon a target. Such a microrobot would be capable of precise lethality, accurate battle-damage assessment, and successful penetration of otherwise inaccessible targets

Novel Integrated System Architecture for an Autonomous Jumping Micro-Robot

As the capability and complexity of robotic platforms continue to evolve from the macro to micro-scale, innovation of such systems is driven by the notion that a robot must be able to sense, think, and act [1]. The traditional architecture of a robotic platform consists of a structural layer upon which, actuators, controls, power, and communication modules are integrated for optimal system performance. The structural layer, for many micro-scale platforms, has commonly been implemented using a silicon die, thus leading to robotic platforms referred to as "walking chips" [2]. In this thesis, the first-ever jumping microrobotic platform is demonstrated using a hybrid integration approach to assemble on-board sensing and power directly onto a polymer chassis. The microrobot detects a change in light intensity and ignites 0.21mg of integrated nanoporous energetic silicon, resulting in 246µJ of kinetic energy and a vertical jump height of 8cm

Process Development for the Fabrication of Spheroidal Microdevice Packages Utilizing MEMS Technologies

Sub-mm3 spherical microrobots are being researched as a path towards reconfigurable wireless networks and programmable matter. The microrobot design requires a spheroidal microdevice package compatible with solar energy collection, wireless sensing, and electrostatic actuation mechanisms to be developed. Throughout this research, a variety of MEMS fabrication techniques were evaluated with regards to their applicability to the packaging process. SF6-based plasma was determined to be a preferable alternative to wet HNA etching when producing repeatable bulk isotropic etches in silicon. The effect of silicon crystal orientation on etch variance and anisotropy was also investigated. HNA polishing was demonstrated as an effective method of reducing undercutting, surface roughness, and anisotropy. MatLab image processing routines were developed and incorporated into etch analysis, providing an efficient method of data collection. A method of performing sophisticated wafer alignment and photolithography processes by leveraging existing cleanroom devices was proposed. This research established a path forward for an advanced packaging scheme designed to move microelectronics packages away from the planar circuit board configurations of the past and into the autonomous architectures of the future. The proposed design is applicable to a wide variety of microelectronics applications while meeting the requirements of the sub-mm3 spherical microrobot system

Concept, modeling and experimental characterization of the modulated friction inertial drive (MFID) locomotion principle:application to mobile microrobots

A mobile microrobot is defined as a robot with a size ranging from 1 in3 down to 100 µm3 and a motion range of at least several times the robot's length. Mobile microrobots have a great potential for a wide range of mid-term and long-term applications such as minimally invasive surgery, inspection, surveillance, monitoring and interaction with the microscale world. A systematic study of the state of the art of locomotion for mobile microrobots shows that there is a need for efficient locomotion solutions for mobile microrobots featuring several degrees of freedom (DOF). This thesis proposes and studies a new locomotion concept based on stepping motion considering a decoupling of the two essential functions of a locomotion principle: slip generation and slip variation. The proposed "Modulated Friction Inertial Drive" (MFID) principle is defined as a stepping locomotion principle in which slip is generated by the inertial effect of a symmetric, axial vibration, while the slip variation is obtained from an active modulation of the friction force. The decoupling of slip generation and slip variation also has lead to the introduction of the concept of a combination of on-board and off-board actuation. This concept allows for an optimal trade-off between robot simplicity and power consumption on the one hand and on-board motion control on the other hand. The stepping motion of a MFID actuator is studied in detail by means of simulation of a numeric model and experimental characterization of a linear MFID actuator. The experimental setup is driven by piezoelectric actuators that vibrate in axial direction in order to generate slip and in perpendicular direction in order to vary the contact force. After identification of the friction parameters a good match between simulation and experimental results is achieved. MFID motion velocity has shown to depend sinusoidally on the phase shift between axial and perpendicular vibration. Motion velocity also increases linearly with increasing vibration amplitudes and driving frequency. Two parameters characterizing the MFID stepping behavior have been introduced. The step efficiency ηstep expresses the efficiency with which the actuator is capable of transforming the axial vibration in net motion. The force ratio qF evaluates the ease with which slip is generated by comparing the maximum inertial force in axial direction to the minimum friction force. The suitability of the MFID principle for mobile microrobot locomotion has been demonstrated by the development and characterization of three locomotion modules with between 2 and 3 DOF. The microrobot prototypes are driven by piezoelectric and electrostatic comb drive actuators and feature a characteristic body length between 20 mm and 10 mm. Characterization results include fast locomotion velocities up to 3 mm/s for typical driving voltages of some tens of volts and driving frequencies ranging from some tens of Hz up to some kHz. Moreover, motion resolutions in the nanometer range and very low power consumption of some tens of µW have been demonstrated. The advantage of the concept of a combination of on-board and off-board actuation has been demonstrated by the on-board simplicity of two of the three prototypes. The prototypes have also demonstrated the major advantage of the MFID principle: resonance operation has shown to reduce the power consumption, reduce the driving voltage and allow for simple driving electronics. Finally, with the fabrication of 2 × 2 mm2 locomotion modules with 2 DOF, a first step towards the development of mm-sized mobile microrobots with on-board motion control is made

ENABLING HARDWARE TECHNOLOGIES FOR AUTONOMY IN TINY ROBOTS: CONTROL, INTEGRATION, ACTUATION

The last two decades have seen many exciting examples of tiny robots from a few cm3 to less than one cm3. Although individually limited, a large group of these robots has the potential to work cooperatively and accomplish complex tasks. Two examples from nature that exhibit this type of cooperation are ant and bee colonies. They have the potential to assist in applications like search and rescue, military scouting, infrastructure and equipment monitoring, nano-manufacture, and possibly medicine. Most of these applications require the high level of autonomy that has been demonstrated by large robotic platforms, such as the iRobot and Honda ASIMO. However, when robot size shrinks down, current approaches to achieve the necessary functions are no longer valid. This work focused on challenges associated with the electronics and fabrication. We addressed three major technical hurdles inherent to current approaches: 1) difficulty of compact integration; 2) need for real-time and power-efficient computations; 3) unavailability of commercial tiny actuators and motion mechanisms. The aim of this work was to provide enabling hardware technologies to achieve autonomy in tiny robots. We proposed a decentralized application-specific integrated circuit (ASIC) where each component is responsible for its own operation and autonomy to the greatest extent possible. The ASIC consists of electronics modules for the fundamental functions required to fulfill the desired autonomy: actuation, control, power supply, and sensing. The actuators and mechanisms could potentially be post-fabricated on the ASIC directly. This design makes for a modular architecture. The following components were shown to work in physical implementations or simulations: 1) a tunable motion controller for ultralow frequency actuation; 2) a nonvolatile memory and programming circuit to achieve automatic and one-time programming; 3) a high-voltage circuit with the highest reported breakdown voltage in standard 0.5 μm CMOS; 4) thermal actuators fabricated using CMOS compatible process; 5) a low-power mixed-signal computational architecture for robotic dynamics simulator; 6) a frequency-boost technique to achieve low jitter in ring oscillators. These contributions will be generally enabling for other systems with strict size and power constraints such as wireless sensor nodes

Design and Implementation of Electromagnetic Actuation System to Actuate Micro/NanoRobots in Viscous Environment

The navigation of Micro/Nanorobots (MNRs) with the ability to track a selected trajectory accurately holds significant promise for different applications in biomedicine, providing methods for diagnoses and treatments inside the human body. The critical challenge is ensuring that the required power can be generated within the MNR. Furthermore, ensuring that it is feasible for the robot to travel inside the human body with the necessary power availability. Currently, MNRs are widely driven either by exogenous power sources (light energy, magnetic fields, electric fields, acoustics fields, etc.) or by endogenous energy sources, such as chemical interaction energy. Various driving techniques have been established, including piezoelectric as a driving source, thermal driving, electro-osmotic force driven by biological bacteria, and micro-motors powered by chemical fuel. These driving techniques have some restrictions, mainly when used in biomedicine. External magnetic fields are another potential power source of MNRs. Magnetic fields can permeate deep tissues and be safe for human organisms. As a result, magnetic fields’ magnetic forces and moments can be applied to MNRs without affecting biological fluids and tissues. Due to their features and characteristics of magnetic fields in generating high power, they are naturally suited to control the electromagnetically actuated MNRs in inaccessible locations due to their ability to go through tiny spaces. From the literature, it can be inferred from the available range of actuation technologies that magnetic actuation performs better than other technologies in terms of controllability, speed, flexibility of the working environment, and far less harm may cause to people. Also, electromagnetic actuation systems may come in various configurations that offer many degrees of freedom, different working mediums, and controllability schemes. Although this is a promising field of research, further simulation studies, and analysis, new smart materials, and the development and building of new real systems physically, and testing the concepts under development from different aspects and application requirements are required to determine whether these systems could be implemented in natural clinical settings on the human body. Also, to understand the latest development in MNRs and the actuation techniques with the associated technologies. Also, there is a need to conduct studies and comparisons to conclude the main research achievements in the field, highlight the critical challenges waiting for answers, and develop new research directions to solve and improve the performance. Therefore, this thesis aims to model and analyze, simulate, design, develop, and implement (with complete hardware and software integration) an electromagnetic actuation (EMA) system to actuate MNRs in the sixdimensional (6D) motion space inside a relatively large region of interest (ROI). The second stage is a simulation; simulation and finite element analysis were conducted. COMSOL multi-physics software is used to analyze the performance of different coils and coil pairs for Helmholtz and Maxwell coil configurations and electromagnetic actuation systems. This leads to the following.: • Finite element analysis (FEA) demonstrates that the Helmholtz coils generate a uniform and consistent magnetic field within a targeted ROI, and the Maxwell coils generate a uniform magnetic gradient. • The possibility to combine Helmholtz and Maxwell coils in different space dimensions. With the ability to actuate an MNR in a 6D space: 3D as a position and 3D as orientation. • Different electromagnetic system configurations are proposed, and their effectiveness in guiding an MNR inside a mimicked blood vessel environment was assessed. • Three pairs of Helmholtz coils and three pairs of coils of Maxwell coils are combined to actuate different size MNRs inside a mimicked blood vessel environment and in 6D. Based on the modeling results, a magnetic actuation system prototype that can control different sizes MNRs was conceived. A closed-loop control algorithm was proposed, and motion analysis of the MNR was conducted and discussed for both position and orientation. Improved EMA location tracking along a chosen trajectory was achieved using a PID-based closed-loop control approach with the best possible parameters. Through the model and analysis stage, the developed system was simulated and tested using open- and closed-loop circumstances. Finally, the closedloop controlled system was concluded and simulated to verify the ability of the proposed EMA to actuate an MN under different trajectory tracking examples with different dimensionality and for different sizes of MNRs. The last stage is developing the experimental setup by manufacturing the coils and their base in-house. Drivers and power supplies are selected according to the specifications that actuate the coils to generate the required magnetic field. Three digital microscopes were integrated with the electromagnetic actuation system to deliver visual feedback aiming to track in real-time the location of the MNR in the 6D high viscous fluidic environment, which leads to enabling closed-loop control. The closed-loop control algorithm is developed to facilitate MNR trajectory tracking and minimize the error accordingly. Accordingly, different tests were carried out to check the uniformity of the magnetic field generated from the coils. Also, a test was done for the digital microscope to check that it was calibrated and it works correctly. Experimental tests were conducted in 1D, 2D plane, and 3D trajectories with two different MNR sizes. The results show the ability of the proposed EMA system to actuate the two different sizes with a tracking error of 20-45 µm depending on the axis and the size of the MNR. The experiments show the ability of the developed EMA system to hold the MNR at any point within the 3D fluidic environment while overcoming the gravity effects. A comparison was made between the results achieved (in simulation and physical experiments) and the results deduced from the literature. The comparison shows that the thesis’s outcomes regarding the error and MNR size used are significant, with better performance relative to the MNR size and value of the error

Planning and control for microassembly of structures composed of stress-engineered MEMS microrobots

We present control strategies that implement planar microassembly using groups of stress-engineered MEMS microrobots (MicroStressBots) controlled through a single global control signal. The global control signal couples the motion of the devices, causing the system to be highly underactuated. In order for the robots to assemble into arbitrary planar shapes despite the high degree of underactuation, it is desirable that each robot be independently maneuverable (independently controllable). To achieve independent control, we fabricated robots that behave (move) differently from one another in response to the same global control signal. We harnessed this differentiation to develop assembly control strategies, where the assembly goal is a desired geometric shape that can be obtained by connecting the chassis of individual robots. We derived and experimentally tested assembly plans that command some of the robots to make progress toward the goal, while other robots are constrained to remain in small circular trajectories (orbits) until it is their turn to move into the goal shape. Our control strategies were tested on systems of fabricated MicroStressBots. The robots are 240–280 µm × 60 µm × 7–20 µm in size and move simultaneously within a single operating environment. We demonstrated the feasibility of our control scheme by accurately assembling five different types of planar microstructures