INTEGRATING NONELECTRONIC COMPONENTS INTO ELECTRONIC MICROSYSTEMS MICROELECTROMECHANICAL SYSTEMS WILL SOON USHER IN A NEW TECHNOLOGICAL RENAISSANCE. JUST AS ICS BROUGHT THE POCKET CALCULATOR, PC, AND VIDEO GAMES, MEMS WILL PROVIDE A NEW SET OF PRODUCTS AN

As electronic systems continually become more sophisticated and complex, the microelectronics technologies used to produce them improve as well. Because such systems serve humans, these systems require an analog interface. Yet signal processing in electronic systems works better with digital signals, which best exploit the benefits of lithography scaling in the IC fabrication process and minimize the need for external components. The digital implementation of many functions also allows the deferment of a significant part of the initial design work and subsequent upgrades to software development, because powerful general-purpose processors can handle a wid