Single-shot pop-out 3D metrology of thin specimens with TEM

Three-dimensional (3D) imaging of thin, extended specimens at nanometer resolution is critical for applications in biology, materials science, advanced synthesis, and manufacturing. Many 3D imaging techniques are limited to surface features, or available only for selective cross-sections, or require a tilt series of a local region, hence making them unsuitable for rapid, non-sacrificial screening of extended objects, or investigating fast dynamics. Here we describe a coherent imaging technique that recovers the 3D volume of a thin specimen with only a single, non-tomographic, energy-filtered, bright-field transmission electron microscopy (TEM) image. This technique does not require physically fracturing or sectioning thin specimens, only needs a single brief exposures to electron doses of ~100 e {\AA}-2, and can be readily calibrated for many existing TEMs; thus it can be widely deployed for rapid 3D metrology that complements existing forms of metrology.Comment: 33 pages, 14 figure