Parylene-based electret power generators

n electret power generator is developed using a new electret made of a charged parylene HT® thin-film polymer. Here, parylene HT® is a room-temperature chemical-vapor-deposited thin-film polymer that is MEMS and CMOS compatible. With corona charge implantation, the surface charge density of parylene HT® is measured as high as 3.69 mC m^−2. Moreover, it is found that, with annealing at 400 °C for 1 h before charge implantation, both the long-term stability and the high-temperature reliability of the electret are improved. For the generator, a new design of the stator/rotor is also developed. The new micro electret generator does not require any sophisticated gap-controlling structure such as tethers. With the conformal coating capability of parylene HT®, it is also feasible to have the electret on the rotors, which is made of either a piece of metal or an insulator. The maximum power output, 17.98 µW, is obtained at 50 Hz with an external load of 80 MΩ. For low frequencies, the generator can harvest 7.7 µW at 10 Hz and 8.23 µW at 20 Hz

Human Blood Cell Sensing with Platinum Black Electroplated Impedance Sensor

AC impedance sensing is an important method for biological cell analysis in flow cytometry. For micro impedance cell sensors, downsizing electrodes increases the double layer impedance of the metal-electrolyte interface, thus leaves no sensing zone in frequency domain and reduces the sensitivity significantly. We proposed using platinum black electroplated electrodes to solve the problem. In this paper, using this technique we demonstrated human blood cell sensing with high signal to noise ratio

Microsystems technology: objectives

This contribution focuses on the objectives of microsystems technology (MST). The reason for this is two fold. First of all, it should explain what MST actually is. This question is often posed and a simple answer is lacking, as a consequence of the diversity of subjects that are perceived as MST. The second reason is that a map of the somewhat chaotic field of MST is needed to identify sub-territories, for which standardization in terms of system modules an interconnections is feasible. To define the objectives a pragmatic approach has been followed. From the literature a selection of topics has been chosen and collected that are perceived as belonging to the field of MST by a large community of workers in the field (more than 250 references). In this way an overview has been created with `applications¿ and `generic issues¿ as the main characteristics

Post-Acquisition Small-Animal Respiratory Gated Imaging Using Micro Cone-Beam CT

On many occasions, it is desirable to image lungs in vivo to perform a pulmonary physiology study. Since the lungs are moving, gating with respect to the ventilatory phase has to be performed in order to minimize motion artifacts. Gating can be done in real time, similar to cardiac imaging in clinical applications, however, there are technical problems that have lead us to investigate different approaches. The problems include breath-to-breath inconsistencies in tidal volume, which makes the precise detection of ventilatory phase difficult, and the relatively high ventilation rates seen in small animals (rats and mice have ventilation rates in the range of a hundred cycles per minute), which challenges the capture rate of many imaging systems (this is particularly true of our system which utilizes cone-beam geometry and a 2 dimensional detector). Instead of pre-capture ventilation gating we implemented a method of post-acquisition gating. We acquire a sequence of projections images at 30 frames per second for each of 360 viewing angles. During each capture sequence the rat undergoes multiple ventilation cycles. Using the sequence of projection images, an automated region of interest algorithm, based on integrated grayscale intensity, tracts the ventilatory phase of the lungs. In the processing of an image sequence, multiple projection images are identified at a particular phase and averaged to improve the signal-to-ratio. The resulting averaged projection images are input to a Feldkamp cone-beam algorithm reconstruction algorithm in order to obtain isotropic image volumes. Minimal motion artifact data sets improve qualitative and quantitative analysis techniques useful in physiologic studies of pulmonary structure and function

Multi-level agent-based modeling - A literature survey

During last decade, multi-level agent-based modeling has received significant and dramatically increasing interest. In this article we present a comprehensive and structured review of literature on the subject. We present the main theoretical contributions and application domains of this concept, with an emphasis on social, flow, biological and biomedical models.Comment: v2. Ref 102 added. v3-4 Many refs and text added v5-6 bibliographic statistics updated. v7 Change of the name of the paper to reflect what it became, many refs and text added, bibliographic statistics update

Maximum Effectiveness of Electrostatic Energy Harvesters When Coupled to Interface Circuits

Accepted versio