Challenges in flexible microsystem manufacturing : fabrication, robotic assembly, control, and packaging.

Microsystems have been investigated with renewed interest for the last three decades because of the emerging development of microelectromechanical system (MEMS) technology and the advancement of nanotechnology. The applications of microrobots and distributed sensors have the potential to revolutionize micro and nano manufacturing and have other important health applications for drug delivery and minimal invasive surgery. A class of microrobots studied in this thesis, such as the Solid Articulated Four Axis Microrobot (sAFAM) are driven by MEMS actuators, transmissions, and end-effectors realized by 3-Dimensional MEMS assembly. Another class of microrobots studied here, like those competing in the annual IEEE Mobile Microrobot Challenge event (MMC) are untethered and driven by external fields, such as magnetic fields generated by a focused permanent magnet. A third class of microsystems studied in this thesis includes distributed MEMS pressure sensors for robotic skin applications that are manufactured in the cleanroom and packaged in our lab. In this thesis, we discuss typical challenges associated with the fabrication, robotic assembly and packaging of these microsystems. For sAFAM we discuss challenges arising from pick and place manipulation under microscopic closed-loop control, as well as bonding and attachment of silicon MEMS microparts. For MMC, we discuss challenges arising from cooperative manipulation of microparts that advance the capabilities of magnetic micro-agents. Custom microrobotic hardware configured and demonstrated during this research (such as the NeXus microassembly station) include micro-positioners, microscopes, and controllers driven via LabVIEW. Finally, we also discuss challenges arising in distributed sensor manufacturing. We describe sensor fabrication steps using clean-room techniques on Kapton flexible substrates, and present results of lamination, interconnection and testing of such sensors are presented

MRI-Based Communication with Untethered Intelligent Medical Microrobots

RESUME Les champs magnétiques présent dans un système clinique d’Imagerie par Résonance Magnétique (IRM) peuvent être exploités non seulement, afin d’induire une force de déplacement sur des microrobots magnétiques tout en permettant l’asservissement de leur position - une technique connue sous le nom de Navigation par Résonance Magnétique (NRM), mais aussi pour mettre en œuvre un procédé de communication. Pour des microrobots autonomes équipés de senseurs ayant un certain niveau d'intelligence et opérant à l'intérieur du corps humain, la puissance de transmission nécessaire pour communiquer des informations à un ordinateur externe par des méthodes présentement connues est insuffisante. Dans ce travail, une technique est décrite où une telle perte de puissance d'émission en raison de la mise à l'échelle de ces microrobots peut être compensée par le scanner IRM agissant aussi comme un récepteur très sensible. La technique de communication prend la forme d'une modification de la fréquence du courant électrique circulant le long d'une bobine miniature incorporé dans un microrobot. La fréquence du courant électrique peut être réglée à partir d'une entrée de seuil prédéterminée du senseur mis en place sur le microrobot. La fréquence devient alors corrélée à l’information de l’état du senseur recueilli par le microrobot et elle est déterminée en utilisant l'IRM. La méthode proposée est indépendante de la position et l'orientation du microrobot et peut être étendue à un grand nombre de microrobots pour surveiller et cartographier les conditions physiologiques spécifiques dans une région plus vaste à n’importe quelle profondeur à l'intérieur du corps.----------ABSTRACT The magnetic environment provided by a clinical Magnetic Resonance Imaging (MRI) scanner can be exploited to not only induce a displacement force on magnetic microrobots while allowing MR-tracking for serving control purpose or positional assessment - a technique known as Magnetic Resonance Navigation (MRN), but also for implementing a method of communication with intelligent microrobots. For untethered sensory microrobots having some level of intelligence and operating inside the body, the transmission power necessary to communicate information to an external computer via known methods is insufficient. In this work, a technique is described where such loss of transmission power due to the scaling of these microrobots can be compensated by the same MRI scanner acting as a more sensitive receiver. A communication scheme is implemented in the form of a frequency alteration in the electrical current circulating along a miniature coil embedded in a microrobot. The frequency of the electrical current could be regulated from a predetermined sensory threshold input implemented on the microrobot. Such a frequency provides information on the level of sensory information gathered by the microrobot, and it is determined using MR imaging. The proposed method is independent of the microrobot's position and orientation and can be extended to a larger number of microrobots for monitoring and mapping specific physiological conditions inside a larger region at any depths within the body

Natural Algae-Inspired Microrobots for Emerging Biomedical Applications and Beyond

Algae-inspired microrobots (AIMs) have attracted intense research over the past decade owing to the abundant desired properties of natural microalgae, such as biocompatibility, autofluorescence, and pharmaceutical activity, which make them ideal candidates for biomedical and related applications. With the deepening and widening of applied research, the functions of AIMs have been greatly enriched and enhanced to meet the needs of demanding application scenarios including targeted drug delivery, anticancer/antibacterial therapy, cell stimulation, wound healing, and biomolecule sensing. Notwithstanding, multiple challenges remain to be tackled for transformative advances and clinical translation. In this review, we aim to provide a comprehensive survey of representative advances in AIMs accompanied by the underlying biological/technological backgrounds. We also highlight existing issues that need to be overcome in AIM developments and suggest future research directions in this field.</p

Medical Imaging of Microrobots: Toward In Vivo Applications

Medical microrobots (MRs) have been demonstrated for a variety of non-invasive biomedical applications, such as tissue engineering, drug delivery, and assisted fertilization, among others. However, most of these demonstrations have been carried out in in vitro settings and under optical microscopy, being significantly different from the clinical practice. Thus, medical imaging techniques are required for localizing and tracking such tiny therapeutic machines when used in medical-relevant applications. This review aims at analyzing the state of the art of microrobots imaging by critically discussing the potentialities and limitations of the techniques employed in this field. Moreover, the physics and the working principle behind each analyzed imaging strategy, the spatiotemporal resolution, and the penetration depth are thoroughly discussed. The paper deals with the suitability of each imaging technique for tracking single or swarms of MRs and discusses the scenarios where contrast or imaging agent's inclusion is required, either to absorb, emit, or reflect a determined physical signal detected by an external system. Finally, the review highlights the existing challenges and perspective solutions which could be promising for future in vivo applications

Microdispositivos:: herramientas para aplicaciones médicas

Abstract: This article reviews the literature on the latest advances in microdevices for medical applications. The objective is to show an overview of the latest devices and their applications, as well as future development vectors in the area. A search of about 170 articles was performed, most of them published between the years 2015 and 2021, of which 53 were chosen as they were the most topical and impactful in the research fields referred to drug delivery, minimally invasive surgery, and cranial and vascular intromissions. It is concluded that, although microdevices are at an advanced stage of research, they still have many challenges to be solved, which has not allowed clinical trials to be completed in many cases. One of the great challenges ahead is to increase the precision in locomotion and to make the devices capable of performing more complex tasks with the help of smaller-scale electronic devices.Resumen: El presente artículo realiza una revisión de la literatura sobre los últimos avances en cuanto a los micro dispositivos para aplicaciones médicas. El objetivo es mostrar un panorama general de los últimos dispositivos y sus aplicaciones, así como los futuros vectores de desarrollo en el área. Se realizó una búsqueda de alrededor de 170 artículos, la mayoría de ellos publicados entre los años 2015 y 2021, de los cuales se eligieron 53 al ser los de mayor actualidad e impacto en los campos de investigación referidos a la administración de fármacos, la cirugía mínimamente invasiva, y las intromisiones craneales y vasculares. Se concluye que, si bien los micro dispositivos están en una etapa avanzada de investigación, aún tienen muchos desafíos por solucionar, lo cual no ha permitido completar en muchos casos las pruebas clínicas. Uno de los grandes desafíos futuros es incrementar la precisión en locomoción y conseguir que los dispositivos puedan realizar tareas más complejas con ayuda de dispositivos electrónicos de menor escala

Wireless capsule endoscope for targeted drug delivery

The diagnosis and treatment of pathologies of the gastrointestinal (GI) tract are performed routinely by gastroenterologists using endoscopes and colonoscopes, however the small intestinal tract is beyond the reach of these conventional systems. Attempts have been made to access the small intestines with wireless capsule endoscopes (WCE). These pill-sized cameras take pictures of the intestinal wall and then relay them back for evaluation. This practice enables the detection and diagnosis of pathologies of the GI tract such as Crohn's disease, small intestinal tumours such as lymphoma and small intestinal cancer. The problems with these systems are that they have limited diagnostic capabilities and they do not offer the ability to perform therapy to the affected areas leaving only the options of administering large quantities of drugs or surgical intervention. To address the issue of administering therapy in the small intestinal tract this thesis presents an active swallowable microrobotic platform which has novel functionality enabling the microrobot to treat pathologies through a targeted drug delivery system. This thesis first reviews the state-of-the-art in WCE through the evaluation of current and past literature. A review of current practises such as flexible sigmoidoscopy, virtual colonoscopy and wireless capsule endoscopy are presented. The following sections review the state-of-the-art in methods of resisting peristalsis, drug targeting systems and drug delivery. A review of actuators is presented, in the context of WCE, with a view to evaluate their acceptability in adding functionality to current WCEs. The thesis presents a novel biologically-inspired holding mechanism which overcomes the issue of resisting natural peristalsis in the GI tract. An analysis of the two components of peristaltic force, circumferential and longitudinal peristaltic contractions, are presented to ensure correct functionality of the holding mechanism. A detailed analysis of the motorised method employed to deploy the expanding mechanism is described and a 5:1 scale prototype is presented which characterises the gearbox and validates the holding mechanism. The functionality of WCE is further extended by the inclusion of a novel targeting mechanism capable of delivering a metered dose of medication to a target site of interest in the GI tract. A solution to the problem of positioning a needle within a 360 degree envelope, operating the needle and safely retracting the needle in the GI tract is discussed. A comprehensive analysis of the mechanism to manoeuvre the needle is presented and validation of the mechanism is demonstrated through the evaluation of scale prototypes. Finally a drug delivery system is presented which can expel a 1 ml dose of medication, stored onboard the capsule, into the subcutaneous tissue of the GI tract wall. An analysis of the force required to expel the medication in a set period of time is presented and the design and analysis of a variable pitch conical compression spring which will be used to deliver the medication is discussed. A thermo mechanical trigger mechanism is presented which will be employed to release the compressed conical spring. Experimental results using 1:1 scale prototype parts validate the performance of the mechanisms.Open Acces

A Novel Propeller Design for Micro-Swimming robot

The applications of a micro-swimming robot such as minimally invasive surgery, liquid pipeline robot etc. are widespread in recent years. The potential application fields are so inspiring, and it is becoming more and more achievable with the development of microbiology and Micro-Electro-Mechanical Systems (MEMS). The aim of this study is to improve the performance of micro-swimming robot through redesign the structure. To achieve the aim, this study reviewed all of the modelling methods of low Reynolds number flow including Resistive-force Theory (RFT), Slender Body Theory (SBT), and Immersed Boundary Method (IBM) etc. The swimming model with these methods has been analysed. Various aspects e.g. hydrodynamic interaction, design, development, optimisation and numerical methods from the previous researches have been studied. Based on the previous design of helix propeller for micro-swimmer, this study has proposed a novel propeller design for a micro-swimming robot which can improve the velocity with simplified propulsion structure. This design has adapted the coaxial symmetric double helix to improve the performance of propulsion and to increase stability. The central lines of two helical tails overlap completely to form a double helix structure, and its tail radial force is balanced with the same direction and can produce a stable axial motion. The verification of this design is conducted using two case studies. The first one is a pipe inspection robot which is in mm scale and swims in high viscosity flow that satisfies the low Reynolds number flow condition. Both simulation and experiment analysis are conducted for this case study. A cross-development method is adopted for the simulation analysis and prototype development. The experiment conditions are set up based on the simulation conditions. The conclusion from the analysis of simulation results gives suggestions to improve design and fabrication for the prototype. Some five revisions of simulation and four revisions of the prototype have been completed. The second case study is the human blood vessel robot. For the limitations of fabrication technology, only simulation is conducted, and the result is compared with previous researches. The results show that the proposed propeller design can improve velocity performance significantly. The main outcomes of this study are the design of a micro-swimming robot with higher velocity performance and the validation from both simulation and experiment

Modeling, simulation and control of microrobots for the microfactory.

Future assembly technologies will involve higher levels of automation in order to satisfy increased microscale or nanoscale precision requirements. Traditionally, assembly using a top-down robotic approach has been well-studied and applied to the microelectronics and MEMS industries, but less so in nanotechnology. With the boom of nanotechnology since the 1990s, newly designed products with new materials, coatings, and nanoparticles are gradually entering everyone’s lives, while the industry has grown into a billion-dollar volume worldwide. Traditionally, nanotechnology products are assembled using bottom-up methods, such as self-assembly, rather than top-down robotic assembly. This is due to considerations of volume handling of large quantities of components, and the high cost associated with top-down manipulation requiring precision. However, bottom-up manufacturing methods have certain limitations, such as components needing to have predefined shapes and surface coatings, and the number of assembly components being limited to very few. For example, in the case of self-assembly of nano-cubes with an origami design, post-assembly manipulation of cubes in large quantities and cost-efficiency is still challenging. In this thesis, we envision a new paradigm for nanoscale assembly, realized with the help of a wafer-scale microfactory containing large numbers of MEMS microrobots. These robots will work together to enhance the throughput of the factory, while their cost will be reduced when compared to conventional nanopositioners. To fulfill the microfactory vision, numerous challenges related to design, power, control, and nanoscale task completion by these microrobots must be overcome. In this work, we study two classes of microrobots for the microfactory: stationary microrobots and mobile microrobots. For the stationary microrobots in our microfactory application, we have designed and modeled two different types of microrobots, the AFAM (Articulated Four Axes Microrobot) and the SolarPede. The AFAM is a millimeter-size robotic arm working as a nanomanipulator for nanoparticles with four degrees of freedom, while the SolarPede is a light-powered centimeter-size robotic conveyor in the microfactory. For mobile microrobots, we have introduced the world’s first laser-driven micrometer-size locomotor in dry environments, called ChevBot to prove the concept of the motion mechanism. The ChevBot is fabricated using MEMS technology in the cleanroom, following a microassembly step. We showed that it can perform locomotion with pulsed laser energy on a dry surface. Based on the knowledge gained with the ChevBot, we refined tits fabrication process to remove the assembly step and increase its reliability. We designed and fabricated a steerable microrobot, the SerpenBot, in order to achieve controllable behavior with the guidance of a laser beam. Through modeling and experimental study of the characteristics of this type of microrobot, we proposed and validated a new type of deep learning controller, the PID-Bayes neural network controller. The experiments showed that the SerpenBot can achieve closed-loop autonomous operation on a dry substrate

An overview of multiple DoF magnetic actuated micro-robots.

International audienceThis paper reviews the state of the art of untethered, wirelessly actuated and controlled micro-robots. Research for such tools is being increasingly pursued to provide solutions for medical, biological and industrial applications. Indeed, due to their small size they o er both high velocity, and accessibility to tiny and clustered environments. These systems could be used for in vitro tasks on lab-on-chips in order to push and/or sort biological cells, or for in vivo tasks like minimally invasive surgery and could also be used in the micro-assembly of microcomponents. However, there are many constraints to actuating, manufacturing and controlling micro-robots, such as the impracticability of on-board sensors and actuators, common hysteresis phenomena and nonlinear behavior in the environment, and the high susceptibility to slight variations in the atmosphere like tiny dust or humidity. In this work, the major challenges that must be addressed are reviewed and some of the best performing multiple DoF micro-robots sized from tens to hundreds m are presented. The di erent magnetic micro-robot platforms are presented and compared. The actuation method as well as the control strategies are analyzed. The reviewed magnetic micro-robots highlight the ability of wireless actuation and show that high velocities can be reached. However, major issues on actuation and control must be overcome in order to perform complex micro-manipulation tasks