Heterogeneous Integration of Low Power pH FinFET sensors with Passive Capillary Microfluidics and miniaturized Ag/AgCl quasi-Reference Electrode

This work presents one of the first low power pH sensing microfluidic chip based on the heterogeneous integration of: (i) high-k FinFET sensors with liquid gate, (ii) miniaturized Ag/AgCl quasi-Reference Electrode and (iii) passive microfluidic. The integration of these three components provides a fully integrated and compact platform that could be exploited for ionic monitoring in biofluids for healthcare applications. We describe the full fabrication process for the microfluidic system with the embedded reference electrode. The electrical characterization of heterogeneously integrated pH FinFET sensor with the integrated reference electrode shows Id-Vg characteristics with subthreshold swing SS~141mV/dec, low Ioff current and ION/IOFF > 105. When applying a constant current operation scheme, a sensitivity of 8mV/pH of the output drain voltage is reported. Due to the biocompatibility of the selected materials and small size, the resulting microsystem-on-chip could be used as a noninvasive wearable sensor for continuous monitoring of pH in sweat

A Flexible, Highly Integrated, Low Power pH Readout

Medical devices are widely employed in everyday life as wearable and implantable technologies make more and more technological breakthroughs. Implantable biosensors can be implanted into the human body for monitoring of relevant physiological parameters, such as pH value, glucose, lactate, CO2 [carbon dioxide], etc. For these applications the implantable unit needs a whole functional set of blocks such as micro- or nano-sensors, sensor signal processing and data generation units, wireless data transmitters etc., which require a well-designed implantable unit.Microelectronics technology with biosensors has caused more and more interest from both academic and industrial areas. With the advancement of microelectronics and microfabrication, it makes possible to fabricate a complete solution on an integrated chip with miniaturized size and low power consumption.This work presents a monolithic pH measurement system with power conditioning system for supply power derived from harvested energy. The proposed system includes a low-power, high linearity pH readout circuits with wide pH values (0-14) and a power conditioning unit based on low drop-out (LDO) voltage regulator. The readout circuit provides square-wave output with frequency being highly linear corresponding to the input pH values. To overcome the process variations, a simple calibration method is employed in the design which makes the output frequency stay constant over process, supply voltage and temperature variations. The prototype circuit is designed and fabricated in a standard 0.13-μm [micro-meter] CMOS process and shows good linearity to cover the entire pH value range from 0-14 while the voltage regulator provides a stable supply voltage for the system

Wearable System with Integrated Passive Microfluidics for Real-Time Electrolyte Sensing in Human Sweat

Wearable systems embodied as patches could offer noninvasive and real-time solutions for monitoring of biomarkers in human sweat as an alternative to blood testing, with applications in personalized and preventive healthcare. Sweat is considered to be a biofluid of foremost interest for analysis due the numerous biomarkers it contains. Recent studies have demonstrated that the concentration of some of these biomarkers in sweat, such as the electrolytes studied in this work, can be directly correlated to their concentrations in blood, making sweat a trusted biofluid candidate for non-invasive diagnostics. Until now, the biggest impediment to onâbody sweat monitoring was the lack of technology to analyze sweat composition in realâtime and mainly to continuously collect it. The goal of this work was to develop the building blocks of such wearable system for sweat electrolyte monitoring, with main emphasis on the passive microfluidics, the integrated miniaturized quasi-reference electrode and the functionalization of the sensing devices. The basic sensor technology is formed by Ion Sensitive Field Effect Transistors (ISFET) realized in FinFET and ultra-thin body Silicon on Insulator technology. This thesis shows the development of a state-of-the-art microsystem that allows multisensing of pH, Na+, K+ electrolyte concentrations in sweat, with high selectivity and high sensitivities (â50 mV/dec for all electrolytes), in a wearable fashion. The microsystem comprises a biocompatible skin interface that collects even infinitesimal quantities of sweat (of the order of hundreds of picoliters to tenths of nanoliters), which the body produces in periods of low physical effort. One of the main achievements of this work is the integration of Ion Sensing Fully Depleted FETs and zero power consumption microfluidics, enabling low power (less than 50 nWatts/sensor) wearable biosensing. The thesis presents the needed technological processes and optimizations, together with their characterization, in order to achieve a Lab-On-Skin system