Flexure-based 6-axis alignment module for automated laser assembly

Based on the requirements from producing miniaturized laser systems, a concept for a flexible robot-based precision assembly has been introduced that features a modular 6-axis alignment module. For a chosen hybrid kinematical structure different analyses for the dimensioning of a flexure-based mechanism have been presented, which led to the design of a prototypal alignment module. The described design approach makes use of an innovative concept for large-displacement compliant joints with superior qualities compared to other notch-type or leaf spring flexures. This concept has been adopted and extended to be applied for all spherical and revolute joints of the alignment module. First measurement results from a CMM proved a repeatability of the manipulator below one micrometer, helped to improve the positioning accuracy significantly, but could not characterize the full potential of the system. Additional interferometer measurements regarding the achievable minimum step width showed far better results and will be continued for a more detailed characterisation of the alignment module