1 research outputs found
Feedforward/feedback multivariable control design for high speed nanopositioning
This paper proposes a two degree of freedom
control using a combined feedforward/feedback architecture
for MIMO nanopositioning stages. The proposed control system provides higher bandwidth and better performance compared with a single degree of freedom feedback controller. The paper proposes a systematic synthesis methodology to design the controller based on closed loop performance. The results are verified via simulation and hardware experiment