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1 research outputs found
Fast Level-Set-Based Inverse Lithography Algorithm for Process Robustness Improvement and Its Application
Author
A Poonawala
BT Polyak
+15Â more
J Li
J Nocedal
Kai-Sheng Luo
L Pang
R Fletcher
W Lv
Wei-Wei Pan
WW Hager
X Ma
Xiao-Lang Yan
Y Liu
Y Shen
Z Geng
Zhen Geng
Zheng Shi
Publication venue
'Springer Science and Business Media LLC'
Publication date
Field of study
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