Construction of a Fish-like Robot Based on High Performance Graphene/PVDF Bimorph Actuation Materials.

Smart actuators have many potential applications in various areas, so the development of novel actuation materials, with facile fabricating methods and excellent performances, are still urgent needs. In this work, a novel electromechanical bimorph actuator constituted by a graphene layer and a PVDF layer, is fabricated through a simple yet versatile solution approach. The bimorph actuator can deflect toward the graphene side under electrical stimulus, due to the differences in coefficient of thermal expansion between the two layers and the converse piezoelectric effect and electrostrictive property of the PVDF layer. Under low voltage stimulus, the actuator (length: 20 mm, width: 3 mm) can generate large actuation motion with a maximum deflection of about 14.0 mm within 0.262 s and produce high actuation stress (more than 312.7 MPa/g). The bimorph actuator also can display reversible swing behavior with long cycle life under high frequencies. on this basis, a fish-like robot that can swim at the speed of 5.02 mm/s is designed and demonstrated. The designed graphene-PVDF bimorph actuator exhibits the overall novel performance compared with many other electromechanical avtuators, and may contribute to the practical actuation applications of graphene-based materials at a macro scale

Fabrication of Embedded Microvalve on PMMA Microfluidic Devices through Surface Functionalization

The integration of a PDMS membrane within orthogonally placed PMMA microfluidic channels enables the pneumatic actuation of valves within bonded PMMA-PDMS-PMMA multilayer devices. Here, surface functionalization of PMMA substrates via acid catalyzed hydrolysis and air plasma corona treatment were investigated as possible techniques to permanently bond PMMA microfluidic channels to PDMS surfaces. FTIR and water contact angle analysis of functionalized PMMA substrates showed that air plasma corona treatment was most effective in inducing PMMA hydrophilicity. Subsequent fluidic tests showed that air plasma modified and bonded PMMA multilayer devices could withstand fluid pressure at an operational flow rate of 9 mircoliters/min. The pneumatic actuation of the embedded PDMS membrane was observed through optical microscopy and an electrical resistance based technique. PDMS membrane actuation occurred at pneumatic pressures of as low as 10kPa and complete valving occurred at 14kPa for 100 micrometers x 100 micrometers channel cross-sections.Comment: Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838

Trade-off analysis and design of a Hydraulic Energy Scavenger

In the last years there has been a growing interest in intelligent, autonomous devices for household applications. In the near future this technology will be part of our society; sensing and actuating will be integrated in the environment of our houses by means of energy scavengers and wireless microsystems. These systems will be capable of monitoring the environment, communicating with people and among each other, actuating and supplying themselves independently. This concept is now possible thanks to the low power consumption of electronic devices and accurate design of energy scavengers to harvest energy from the surrounding environment. In principle, an autonomous device comprises three main subsystems: an energy scavenger, an energy storage unit and an operational stage. The energy scavenger is capable of harvesting very small amounts of energy from the surroundings and converting it into electrical energy. This energy can be stored in a small storage unit like a small battery or capacitor, thus being available as a power supply. The operational stage can perform a variety of tasks depending on the application. Inside its application range, this kind of system presents several advantages with respect to regular devices using external energy supplies. They can be simpler to apply as no external connections are needed; they are environmentally friendly and might be economically advantageous in the long term. Furthermore, their autonomous nature permits the application in locations where the local energy grid is not present and allows them to be ‘hidden' in the environment, being independent from interaction with humans. In the present paper an energy-harvesting system used to supply a hydraulic control valve of a heating system for a typical residential application is studied. The system converts the kinetic energy from the water flow inside the pipes of the heating system to power the energy scavenger. The harvesting unit is composed of a hydraulic turbine that converts the kinetic energy of the water flow into rotational motion to drive a small electric generator. The design phases comprise a trade-off analysis to define the most suitable hydraulic turbine and electric generator for the energy scavenger, and an optimization of the components to satisfy the systems specification

MEMS-enabled silicon photonic integrated devices and circuits

Photonic integrated circuits have seen a dramatic increase in complexity over the past decades. This development has been spurred by recent applications in datacenter communications and enabled by the availability of standardized mature technology platforms. Mechanical movement of wave-guiding structures at the micro- and nanoscale provides unique opportunities to further enhance functionality and to reduce power consumption in photonic integrated circuits. We here demonstrate integration of MEMS-enabled components in a simplified silicon photonics process based on IMEC's Standard iSiPP50G Silicon Photonics Platform and a custom release process

A Review of Smart Materials in Tactile Actuators for Information Delivery

As the largest organ in the human body, the skin provides the important sensory channel for humans to receive external stimulations based on touch. By the information perceived through touch, people can feel and guess the properties of objects, like weight, temperature, textures, and motion, etc. In fact, those properties are nerve stimuli to our brain received by different kinds of receptors in the skin. Mechanical, electrical, and thermal stimuli can stimulate these receptors and cause different information to be conveyed through the nerves. Technologies for actuators to provide mechanical, electrical or thermal stimuli have been developed. These include static or vibrational actuation, electrostatic stimulation, focused ultrasound, and more. Smart materials, such as piezoelectric materials, carbon nanotubes, and shape memory alloys, play important roles in providing actuation for tactile sensation. This paper aims to review the background biological knowledge of human tactile sensing, to give an understanding of how we sense and interact with the world through the sense of touch, as well as the conventional and state-of-the-art technologies of tactile actuators for tactile feedback delivery

Microswitches with Sputtered Au, AuPd,Au-on-AuPt, and AuPtCu Alloy Electric Contacts

This paper is the first to report on a new analytic model for predicting microcontact resistance and the design, fabrication, and testing of microelectromechanical systems (MEMS) metal contact switches with sputtered bimetallic (i.e., gold (Au)-on-Au-platinum (Pt), (Au-on-Au-(6.3at%)Pt)), binary alloy (i.e., Au-palladium (Pd), (Au-(3.7at%)Pd)), and ternary alloy (i.e., Au-Pt-copper (Cu), (Au-(5.0at%)Pt-(0.5at%)Cu)) electric contacts. The microswitches with bimetallic and binary alloy contacts resulted in contact resistance values between 1-2Omega. Preliminary reliability testing indicates a 3times increase in switching lifetime when compared to microswitches with sputtered Au electric contacts. The ternary alloy exhibited approximately a 6times increase in switch lifetime with contact resistance values ranging from approximately 0.2-1.8Omeg

Electrostatic actuation of silicon optomechanical resonators

Optomechanical systems offer one of the most sensitive methods for detecting mechanical motion using shifts in the optical resonance frequency of the optomechanical resonator . Presently, these systems are used for measuring mechanical thermal noise displacement or mechanical motion actuated by optical forces. Electrostatic capacitive actuation and detection have been shown previously for silicon micro electro mechanical resonators for application in filters and oscillators. Here, we demonstrate monolithic integration of electrostatic capacitive actuation with optical sensing using silicon optomechanical disk resonators and waveguides. The electrically excited mechanical motion is observed as an optical intensity modulation when the input electrical signal is at a frequency of 235MHz corresponding to the radial vibrational mode of the silicon microdisk

Performance of RF MEMS switches at low temperatures

The actuation voltage of microelectromechanical system (MEMS) \ud metal switches was investigated at temperatures ranging from 10 to 290 K. The investigation shows a 50% increase in the actuation voltage at low temperature. A comparison has been made using a published model and showed similar increment of actuation voltage at low temperature