Challenges in flexible microsystem manufacturing : fabrication, robotic assembly, control, and packaging.

Microsystems have been investigated with renewed interest for the last three decades because of the emerging development of microelectromechanical system (MEMS) technology and the advancement of nanotechnology. The applications of microrobots and distributed sensors have the potential to revolutionize micro and nano manufacturing and have other important health applications for drug delivery and minimal invasive surgery. A class of microrobots studied in this thesis, such as the Solid Articulated Four Axis Microrobot (sAFAM) are driven by MEMS actuators, transmissions, and end-effectors realized by 3-Dimensional MEMS assembly. Another class of microrobots studied here, like those competing in the annual IEEE Mobile Microrobot Challenge event (MMC) are untethered and driven by external fields, such as magnetic fields generated by a focused permanent magnet. A third class of microsystems studied in this thesis includes distributed MEMS pressure sensors for robotic skin applications that are manufactured in the cleanroom and packaged in our lab. In this thesis, we discuss typical challenges associated with the fabrication, robotic assembly and packaging of these microsystems. For sAFAM we discuss challenges arising from pick and place manipulation under microscopic closed-loop control, as well as bonding and attachment of silicon MEMS microparts. For MMC, we discuss challenges arising from cooperative manipulation of microparts that advance the capabilities of magnetic micro-agents. Custom microrobotic hardware configured and demonstrated during this research (such as the NeXus microassembly station) include micro-positioners, microscopes, and controllers driven via LabVIEW. Finally, we also discuss challenges arising in distributed sensor manufacturing. We describe sensor fabrication steps using clean-room techniques on Kapton flexible substrates, and present results of lamination, interconnection and testing of such sensors are presented

Modeling and Control of a Magnetic Drug Delivery System

Therapeutic operation risk has been reduced by the use of micro-robots, allowing highly invasive surgery to be replaced by low invasive surgery (LIS), which provides an effective tool even in previously inaccessible parts of the human body. LIS techniques help delivering drugs effectively via micro-carriers. The micro-carriers are divided into two groups: tethered devices, which are supported by internally supplied propulsion mechanism, and untethered devices. Remote actuation is the critical issue in micro-device navigation, especially through blood vessels. To achieve remote control within the cardiovascular system, magnetic propulsion offers an advantage over other proposed actuation methods. In the literature, most research has focused on micro-device structural design, while there is a lack of research into design and analysis of combined structure and control. As the main part, integrating the principle of electromagnetic induced force by feedback control design will lead to the desired automatic movement. An actuator configuration should thus first be designed to initiate the desired force. The design is basically defining the type and placement of a set of coils to achieve an operational goal. In this project, the magnetic actuation is initiated by a combination of four electromagnets and two sets of uniform coils. Preliminary studies on 2D navigation of a ferromagnetic particle are used to show the effect of actuator structure on controller performance. Accordingly, the performance of the four electromagnets combination is compared to the proposed augmented structure with uniform coils. The simulation results show the improved efficiency of the augmented structure. In more general cases, the arrangement and number of electromagnets are unknown and should be defined. An optimization method is suggested to find these variables when the working space is maximized. Finally, the problem of robust output regulation of the electromagnetic system driven by a linear exosystem, is also addressed in this project. The exosystem is assumed to be neutrally stable with unknown frequencies. The parallel connection of two controllers, a robust stabilizer and an internal model-based controller, is presented to eliminate the output error. In the latter one, an adaptation is used to tune the internal model frequencies such that a steady-state control is produced to maintain the output-zeroing condition. The robust regulation with a local domain of convergence is achieved for a special class of decomposable MIMO nonlinear minimum-phase system. The simulation results show the effectiveness and robustness of this method for the electromagnetic system when two different paths are considered