Workshop on "Robotic assembly of 3D MEMS".

Proceedings of a workshop proposed in IEEE IROS'2007.The increase of MEMS' functionalities often requires the integration of various technologies used for mechanical, optical and electronic subsystems in order to achieve a unique system. These different technologies have usually process incompatibilities and the whole microsystem can not be obtained monolithically and then requires microassembly steps. Microassembly of MEMS based on micrometric components is one of the most promising approaches to achieve high-performance MEMS. Moreover, microassembly also permits to develop suitable MEMS packaging as well as 3D components although microfabrication technologies are usually able to create 2D and "2.5D" components. The study of microassembly methods is consequently a high stake for MEMS technologies growth. Two approaches are currently developped for microassembly: self-assembly and robotic microassembly. In the first one, the assembly is highly parallel but the efficiency and the flexibility still stay low. The robotic approach has the potential to reach precise and reliable assembly with high flexibility. The proposed workshop focuses on this second approach and will take a bearing of the corresponding microrobotic issues. Beyond the microfabrication technologies, performing MEMS microassembly requires, micromanipulation strategies, microworld dynamics and attachment technologies. The design and the fabrication of the microrobot end-effectors as well as the assembled micro-parts require the use of microfabrication technologies. Moreover new micromanipulation strategies are necessary to handle and position micro-parts with sufficiently high accuracy during assembly. The dynamic behaviour of micrometric objects has also to be studied and controlled. Finally, after positioning the micro-part, attachment technologies are necessary

Force Sensing and Control in Micromanipulation

Ph.DDOCTOR OF PHILOSOPH

Workshop on "Control issues in the micro / nano - world".

International audienceDuring the last decade, the need of systems with micro/nanometers accuracy and fast dynamics has been growing rapidly. Such systems occur in applications including 1) micromanipulation of biological cells, 2) micrassembly of MEMS/MOEMS, 3) micro/nanosensors for environmental monitoring, 4) nanometer resolution imaging and metrology (AFM and SEM). The scale and requirement of such systems present a number of challenges to the control system design that will be addressed in this workshop. Working in the micro/nano-world involves displacements from nanometers to tens of microns. Because of this precision requirement, environmental conditions such as temperature, humidity, vibration, could generate noise and disturbance that are in the same range as the displacements of interest. The so-called smart materials, e.g., piezoceramics, magnetostrictive, shape memory, electroactive polymer, have been used for actuation or sensing in the micro/nano-world. They allow high resolution positioning as compared to hinges based systems. However, these materials exhibit hysteresis nonlinearity, and in the case of piezoelectric materials, drifts (called creep) in response to constant inputs In the case of oscillating micro/nano-structures (cantilever, tube), these nonlinearities and vibrations strongly decrease their performances. Many MEMS and NEMS applications involve gripping, feeding, or sorting, operations, where sensor feedback is necessary for their execution. Sensors that are readily available, e.g., interferometer, triangulation laser, and machine vision, are bulky and expensive. Sensors that are compact in size and convenient for packaging, e.g., strain gage, piezoceramic charge sensor, etc., have limited performance or robustness. To account for these difficulties, new control oriented techniques are emerging, such as[d the combination of two or more ‘packageable' sensors , the use of feedforward control technique which does not require sensors, and the use of robust controllers which account the sensor characteristics. The aim of this workshop is to provide a forum for specialists to present and overview the different approaches of control system design for the micro/nano-world and to initiate collaborations and joint projects

Advanced medical micro-robotics for early diagnosis and therapeutic interventions

Recent technological advances in micro-robotics have demonstrated their immense potential for biomedical applications. Emerging micro-robots have versatile sensing systems, flexible locomotion and dexterous manipulation capabilities that can significantly contribute to the healthcare system. Despite the appreciated and tangible benefits of medical micro-robotics, many challenges still remain. Here, we review the major challenges, current trends and significant achievements for developing versatile and intelligent micro-robotics with a focus on applications in early diagnosis and therapeutic interventions. We also consider some recent emerging micro-robotic technologies that employ synthetic biology to support a new generation of living micro-robots. We expect to inspire future development of micro-robots toward clinical translation by identifying the roadblocks that need to be overcome

Scalability study for robotic hand platform

The goal of this thesis project was to determine the lower limit of scale for the RIT robotic grasping hand. This was accomplished using a combination of computer simulation and experimental studies. A force analysis was conducted to determine the size of air muscles required to achieve appropriate contact forces at a smaller scale. Input variables, such as the actuation force and tendon return force, were determined experimentally. A dynamic computer model of the hand system was then created using Recurdyn. This was used to predict the contact (grasping) force of the fingers at full-scale, half-scale, and quarter-scale. Correlation between the computer model and physical testing was achieved for both a life-size and half-scale finger assembly. To further demonstrate the scalability of the hand design, both half and quarter-scale robotic hand rapid prototype assemblies were built using 3D printing techniques. This thesis work identified the point where further miniaturization would require a change in the manufacturing process to micro-fabrication. Several techniques were compared as potential methods for making a production intent quarter-scale robotic hand. Investment casting, Swiss machining, and Selective Laser Sintering were the manufacturing techniques considered. A quarter-scale robotic hand tested the limits of each technology. Below this scale, micro-machining would be required. The break point for the current actuation method, air muscles, was also explored. Below the quarter-scale, an alternative actuation method would also be required. Electroactive Polymers were discussed as an option for the micro-scale. In summary, a dynamic model of the RIT robotic grasping hand was created and validated as scalable at full and half-scales. The model was then used to predict finger contact forces at the quarter-scale. The quarter-scale was identified as the break point in terms of the current RIT robotic grasping hand based on both manufacturing and actuation. A novel, prototype quarter-scale robotic hand assembly was successfully built by an additive manufacturing process, a high resolution 3D printer. However, further miniaturization would require alternate manufacturing techniques and actuation mechanisms

Modeling and experimental validation of a parallel microrobot for biomanipulation

The main purpose of this project is the development of a commercial micropositioner's (SmarPod 115.25, SmarAct GmbH) geometrical model. SmarPod is characterized by parallel kinematics and is employed for precise and accurate sample's positioning under SEM microscope, being vacuum-compatible, for various applications. Geometrical modeling represents the preliminar step to fully understand, and possibly improve, robot's closed loop behaviour in terms of task's quality precision, when enterprises does not provide sufficient documentation. The robotic system, in fact, represents in this case a "black box" from which it's possible to extract information. This step is essential in order to improve, consequently, the reliability of bio-microsystem manipulation and characterization. Disposing of a detailed microrobot's model becomes essential to deal with the typical lack of sensing at microscale, as it allows a 3D precise and adequate reconstruction, realized through proper softwares, of the manipulation set-up. The roles of Virtual Reality (VR) and of simulations, carried out, in this case, in Blender environment, are asserted as well as an essential helping tool in mycrosystem's task planning. Blender is a professional free and open-source 3D computer graphics software and it is proven to be a basic instrument to validate microrobot's model, even to simplify it in case of complex system's geometries

マルチ スケール キノウ ヲ ユウスル コウソク ジドウ マイクロ マニピュレーション システム

Ebubekir Avci, Chanh-Nghiem Nguyen, Kenichi Ohara, Yasushi Mae, Tatsuo Arai, Analysis and suppression of residual vibration in microhand for high-speed single-cell manipulation, International Journal of Mechatronics and Automation, 2013-Vol.3, No.2, pp.110-11

Measurement of Z-Directional Individual Fibre-Fibre Bond Strength and Microfibril Angle Using Microrobotics

The use of microrobotics in high throughput and precise characterization of objects at microscale has been noticeably increased during recent years. Microrobotics has provided a significant added value to multiple realms e.g. biomedical research, bio-based industry, microassembly of miniature products, etc. Recently, the use of microrobotic technology in paper industry has been also commenced for measuring properties at the single fibre level. There is a large interest in the measurement of different loading modes of individual fibre-fibre bonds in pulp and paper/board industry. Among the four different modes of loading, it would be desirable for papermaking companies and paper converting companies to obtain the Z-directional strength of pulp and paper. Indeed, the Z-directional properties affect compressive properties, and accordingly the performance of structural paperboard products. Several methods have been developed to measure the Z-directional strength at a handsheet level; however, there is not any reported device capable of the Z-directional fibre-fibre bond strength measurement at a fibre level. This thesis work presents a novel method for the experimental evaluation of the Z-directional bond strength using microrobotics and a Polyvinylidene fluoride (PVDF) film microforce sensor. Due to the special dynamics of PVDF microforce sensors, the effect of the deformation rate on the performance of the sensor is studied. The Z-directional fibre-fibre bond strength experiments have been performed successfully for unrefined and refined bleached softwood Kraft pulp fibres. Besides, paper scientists are interested in microfibril angle changes during and after application of the Z-directional force. Indeed, there is interest in simultaneous measurement of microfibril angle and mechanical properties such as Z-directional bond strength. To address this need, a microfibril angle measurements system based on microscopic transmission ellipsometry is developed and integrated to the microrobotic platform. The results from both Z-directional bond strength and microfibril angle measurement are promising. In summary, the first concept for simultaneous measurement of microfibril angle and mechanical properties such as Z-directional bond strength at the individual fibre level is developed during this thesis work which has a high practical impact on the fibre characterization research field