1 research outputs found
CMOS-compatible, piezo-optomechanically tunable photonics for visible wavelengths and cryogenic temperatures
We demonstrate a platform for phase and amplitude modulation in silicon
nitride photonic integrated circuits via piezo-optomechanical coupling using
tightly mechanically coupled aluminum nitride actuators. The platform,
fabricated in a CMOS foundry, enables scalable active photonic integrated
circuits for visible wavelengths, and the piezoelectric actuation functions
without performance degradation down to cryogenic temperatures. As an example
of the potential of the platform, we demonstrate a compact (~40 {\mu}m
diameter) silicon nitride ring resonator modulator operating at 780 nm with
intrinsic quality factors in excess of 1.5 million, >10 dB change in extinction
ratio with 2 V applied, a switching time less than 4 ns, and a switching energy
of 0.5 pJ/bit. We characterize the exemplary device at room temperature and 7
K. At 7 K, the device obtains a resistance of approximately 20 Teraohms,
allowing it to operate with sub-picowatt electrical power dissipation. We
further demonstrate a Mach-Zehnder modulator constructed in the same platform
with piezoelectrically tunable phase shifting arms, with 750 ns switching time
constant and 20 nW steady-state power dissipation at room temperature