Adaptive scanning optical microscope (ASOM) for large workspace micro-robotic applications

Abstract — Manipulation and assembly tasks associated with micro-systems, biotechnology, and product miniaturization demand that robots increasingly operate at microscopic dimensions. This paper discusses a new microscope design, called the Adaptive Scanning Optical Microscope (ASOM), that is particularly suitable for observing robotic activities at the micron scale. The ASOM combines a custom designed scanner lens, high speed steering mirror, and MEMS deformable mirror to offer the advantages of a greatly expanded field of view, rapid image acquisition, and no agitation to the workspace or specimen. After briefly discussing the challenges of micro assembly and micro manipulation, we present the ASOM theory of operation and include simulated performance results. A low cost proof-ofconcept experimental prototype of the ASOM is then described and used to demonstrate shape optimization of the MEMS deformable mirror for different field positions. Realtime tracking of multiple micromanipulators in a workspace and full area coverage are experimentally demonstrated. These results validate the ASOM concept and serve as a crucial step towards realizing a fully operational and high performance ASOM to enable the observation of micro-robotic activities over a large workspace. I