Microrobots for wafer scale microfactory: design fabrication integration and control.

Future assembly technologies will involve higher automation levels, in order to satisfy increased micro scale or nano scale precision requirements. Traditionally, assembly using a top-down robotic approach has been well-studied and applied to micro-electronics and MEMS industries, but less so in nanotechnology. With the bloom of nanotechnology ever since the 1990s, newly designed products with new materials, coatings and nanoparticles are gradually entering everyone’s life, while the industry has grown into a billion-dollar volume worldwide. Traditionally, nanotechnology products are assembled using bottom-up methods, such as self-assembly, rather than with top-down robotic assembly. This is due to considerations of volume handling of large quantities of components, and the high cost associated to top-down manipulation with the required precision. However, the bottom-up manufacturing methods have certain limitations, such as components need to have pre-define shapes and surface coatings, and the number of assembly components is limited to very few. For example, in the case of self-assembly of nano-cubes with origami design, post-assembly manipulation of cubes in large quantities and cost-efficiency is still challenging. In this thesis, we envision a new paradigm for nano scale assembly, realized with the help of a wafer-scale microfactory containing large numbers of MEMS microrobots. These robots will work together to enhance the throughput of the factory, while their cost will be reduced when compared to conventional nano positioners. To fulfill the microfactory vision, numerous challenges related to design, power, control and nanoscale task completion by these microrobots must be overcome. In this work, we study three types of microrobots for the microfactory: a world’s first laser-driven micrometer-size locomotor called ChevBot，a stationary millimeter-size robotic arm, called Solid Articulated Four Axes Microrobot (sAFAM), and a light-powered centimeter-size crawler microrobot called SolarPede. The ChevBot can perform autonomous navigation and positioning on a dry surface with the guidance of a laser beam. The sAFAM has been designed to perform nano positioning in four degrees of freedom, and nanoscale tasks such as indentation, and manipulation. And the SolarPede serves as a mobile workspace or transporter in the microfactory environment

Interlocking structure design and assembly

Many objects in our life are not manufactured as whole rigid pieces. Instead, smaller components are made to be later assembled into larger structures. Chairs are assembled from wooden pieces, cabins are made of logs, and buildings are constructed from bricks. These components are commonly designed by many iterations of human thinking. In this report, we will look at a few problems related to interlocking components design and assembly. Given an atomic object, how can we design a package that holds the object firmly without a gap in-between? How many pieces should the package be partitioned into? How can we assemble/extract each piece? We will attack this problem by first looking at the lower bound on the number of pieces, then at the upper bound. Afterwards, we will propose a practical algorithm for designing these packages. We also explore a special kind of interlocking structure which has only one or a small number of movable pieces. For example, a burr puzzle. We will design a few blocks with joints whose combination can be assembled into almost any voxelized 3D model. Our blocks require very simple motions to be assembled, enabling robotic assembly. As proof of concept, we also develop a robot system to assemble the blocks. In some extreme conditions where construction components are small, controlling each component individually is impossible. We will discuss an option using global controls. These global controls can be from gravity or magnetic fields. We show that in some special cases where the small units form a rectangular matrix, rearrangement can be done in a small space following a technique similar to bubble sort algorithm