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2 research outputs found
A sparse matrix model-based optical proximity correction algorithm with model-based mapping between segments and control sites
Author
B. Painter
F.M. Schellenberg
+14Â more
F.M. Schellenberg
H.H. Hopkins
J. Schoot van
J. Word
K. Herold
N.B. Cobb
N.B. Cobb
N.B. Cobb
P. Yu
R. Weeks Jr.
S.H. Choi
T. Terasawa
Y. Chen
Y. Granik
Publication venue
'Zhejiang University Press'
Publication date
Field of study
No full text
Crossref
Erratum to: A sparse matrix model-based optical proximity correction algorithm with model-based mapping between segments and control sites
Author
Publication venue
'Zhejiang University Press'
Publication date
Field of study
No full text
Crossref