Precise control of phase transformation process in lead zirconate titanate thin films by focused line-beam scanning

Phase transformation and grain growth processes of lead zirconate titanate (PZT) thin films have been precisely controlled by using focused line-beam scanning. The authors promoted the lateral crystallization of PZT grains by controlling a nucleation process and increasing the size of single grains to be as large as 40 μm in length. Focused line-beam scanning allows for the selective growth and crystallization of large PZT grains on predetermined nucleation sites. The high growth rate of the selected PZT grains was attributed to successive suppression of undesirable nucleation except at predetermined positions when pretreated PZT films were exposed to the focused line beam. © 2007 American Institute of Physics