Design and development of the Moore three axis measuring machine control system

Abstract

The aim of this work is to update an existing interferometric three-axis measuring machine, used for measuring diameters and optical scales, by completely re-designing and implementing a new control system. The project involves the integration of new motors and drivers, along with the development of a C++ software program to manage the instrumentation. The upgraded machine features an advanced movement system and instruments for reading environmental parameters, which are crucial for calculating the refractive index of air for the correction of the laser wavelength and for compensating thermal errors. By incorporating these innovations, this research aims to minimize uncertainty in both positioning and interferometric measurements of the samples, thereby enhancing the reliability, traceability to the International System of Units (SI) and precision of the measurements. This technical report will explore the challenges encountered during the modernization process, including the selection of appropriate components and the calibration of the system. Additionally, it will present the methodologies employed to ensure accurate data acquisition and processing. Finally, this work aims to optimize the performance of the renewed measuring machine, improving the quality and the timing of the calibration service provided and opening the way to novel precise geometric measurements in various research applications (e.g. semiconductor, automotive, energy, etc.)