conference paper
Automated growth of AlAs/GaAs Bragg mirror with real-time feedback reflectometry.
Abstract
International audienc- info:eu-repo/semantics/conferenceObject
- Conference poster
- Molecular Beam Epitaxy MBE
- in-situ measurement
- feedback
- VCSEL
- vertical-cavity surface-emitting laser
- optical indices
- refractive index
- smart MBE
- [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
- [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci]
Similar works
This paper was published in HAL-INSA Toulouse.
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Licence: info:eu-repo/semantics/OpenAccess