Atomic Structures and Mechanical Properties of Magnetron Co-Sputtered Zr-V-N Coatings

Abstract

Zr-V-N coatings with varying Zr and V content were deposited by magnetron sputtering. Transmission electron microscopy (TEM) cross-section images of the coatings show a dense structure with tightly packed V-shaped columns. x-ray diffraction (XRD) and x-ray absorption fine spectroscopy (XAFS) were carried out to characterize the microstructure of the Zr-N-V thin films. The structural models derived from XAFS reveals segregation of metal domains within the Zr-V-N films. The Zr-V-N sample with Zr/V molar ratios around 3.5:1, which has a higher hardness and more stable wear resistance compared with other Zr-V-N coatings, is a promising material for industrial applications