oaioai:ir.ciac.jl.cn:322003/78348

电化学沉积制备图案化薄膜材料的方法

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Publication date
19 January 2015
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Abstract

本发明公开了一种电化学沉积制备图案化薄膜材料的方法,属于薄膜材料制备技术领域。解决了现有技术中图案化薄膜材料的制备方法成本高、耗时长,只能制备刚性电极,ITO导电基底无法重复利用的技术问题。该方法先采用电化学沉积方法在图案化ITO导电基底上沉积薄膜；然后将沉积有薄膜的ITO导电基底冲洗干净并吹干,用胶布粘贴在沉积有薄膜的ITO导电基底的表面,刮平后,揭下,得到图案化的薄膜材料。该方法制备速度快、精度极高,短至数十秒即可以制备线宽精度为2微米的薄膜材料；且不消耗图案化ITO导电基底,ITO导电基底可以重复利用,完全没有废料产生,成本极低

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Changchun Institute of Applied Chemistry, Chinese Academy Of Sciences

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oaioai:ir.ciac.jl.cn:322003/78348
Last time updated on 13/03/2018

This paper was published in Changchun Institute of Applied Chemistry, Chinese Academy Of Sciences.

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