Design and Analysis of Highly Efficient Reflective 1x3 Splitting Grating with Triangular Structure

Abstract

A highly efficient reflective 1x3 splitting grating with triangular structure operating in 1.064 mu m wavelength under normal incidence for TE polarization is designed. The schematic of the grating has four layers. The first layer with SiO2 is triangular structure. Rigorous coupled wave analysis (RCWA) and Simulated Annealing (SA) algorithm are adopted to design and analyze the properties. The theoretical efficiency is nearly about 99%. The bigger error tolerance is also analyzed by rigorous coupled wave analysis. These reflective gratings as splitters should be useful optical elements in the field of high-power laser as well as other reflective applications