Surface Topology Reconstruction From The White Light Interferogram By Means Of Prony Analysis

Abstract

The paper presents a new method of surface topology reconstruction from a white light interferogram. The method is based on interferogram modelling by complex exponents (Prony method). The compatibility of white light interferogram and Prony models has already been proven. Effectiveness of the method was tested by modelling and examining reconstruction of tilted and spherical surfaces, and by estimating the reconstruction accuracy