Distributed feedback guided surface acoustic wave microresonator

Abstract

Surface acoustic wave resonators have been used in a number of applications: high‐Q frequency filtering, very accurate frequency sources, etc. A major disadvantage of conventional resonators is their large dimensions, which makes them inadequate for integrated acoustics applications. In order to overcome these size limitations a new type of microresonator was designed, developed, and tested. In this paper, theoretical calculations and measurements on two kinds of such devices (a corrugated waveguide filter and a microresonator structure) are presented and their possible applications are discussed