Experimental Study of Multilayer Piezo-magnetic SAW Delay Line for Magnetic Sensor

Abstract

AbstractThis communication describes an experimental study of multilayer piezo-magnetic acoustic wave devices used as sensors of external magnetic fields applied in plane, parallel or perpendicular to the direction of the acoustic wave propagation direction. The considered device consists of a layered structure Mag/ZnO/IDT/LNY-128, Mag being the sensitive magnetoelastic layer. Two magnetoelastic films are investigated as sensitive layers: Ni and CoFeB. Their sensitivities to the magnetic field intensity and direction are measured and compared

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This paper was published in Elsevier - Publisher Connector .

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