journal article
oaidoi:10.1016/S0961-1290(00)87979-X

ISM WYSIWYG: ‘What you see is what you grow’

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Publication date
29 February 2000
Publisher
Published by Elsevier Ltd.
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    Abstract

    AbstractIn-situ monitoring (ISM) has come of age in the past couple of years and will be a critical component of metal-organic vapour phase epitaxy (MOVPE) R&D and production systems into the new century. This overview focuses on commercial MOVPE applications for ISM and reflects the comments of representative suppliers and users of the equipment

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