Rectangular Symmetry Morphologies in a Topographically Templated Block Copolymer

Abstract

Using an array of majority-block-functionalized posts makes it possible to locally control the self-assembly of a block copolymer and achieve several morphologies on a single substrate. A template consisting of a square symmetry array of posts produces a square-symmetry lattice of microdomains, which doubles the areal density of features.Semiconductor Research CorporationFENA CenterSemiconductor Research Corporation. Nanoscale Research InitiativeSingapore-MIT AllianceNational Science Foundation (U.S.)Taiwan Semiconductor Manufacturing CompanyTokyo Electron LimitedNational University of Singapor