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Large-range Single-axis Nanopositioning System

By Ryan Earl, David Hiemstra, Cory Welch and Ivan Yahya

Abstract

ME450 Capstone Design and Manufacturing Experience: Winter 2010Nanopositioning systems provide controlled motion with resolution on the nano-scale. They are critical in many applications including scanning probe microscopy, nano-manufacturing, and hard-disk drive testing. Current nanopositioning technologies can achieve a resolution of 0.02 nm, but are limited to a range of a few hundred microns. We were tasked to design and manufacture a system with a larger range than is currently available utilizing a voice-coil actuator and a flexure bearing for Professor Shorya Awtar and Mr. Gaurav Parmar. Our prototype will be used to test the control systems of our sponsors’ current two-axis nanopositioning system. Our nanopositioning system would need to meet the following engineering specifications

Topics: ME450
Year: 2010
OAI identifier: oai:deepblue.lib.umich.edu:2027.42/109376

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