Development of IR Heating MOCVD System

By 正義梅野, 孝之鈴木, 哲夫曽我, 孝志神保, マサヨシウメノ and Masayoshi Umeno

Publisher: 名古屋工業大学

Year: 1992

OAI identifier: oai:repo.lib.nitech.ac.jp:123456789/1024

Provided by: Nagoya Institute of Technology Repository System

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