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Approaches for the reduction of the influence of parasitic capacitances on local IV characteristics for conductive AFM: Presentations held at 17th Workshop on Dielectrics in Microelectronics, June 25-27, Dresden, Germany

By Mathias Rommel, Joachim D. Jambreck, Katsuhisa Murakami, Martin Lemberger, Christoph Richter, Philip Weinzierl, Anton J. Bauer and Lothar Frey
Topics: tunneling AFM, TUNA, conductive AFM, cAFM, parasitic capacitance, displacement current, shielded AFM probes
Year: 2012
OAI identifier: oai:fraunhofer.de:N-208464
Provided by: Fraunhofer-ePrints
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