Skip to main content
Article thumbnail
Location of Repository

Approaches for the reduction of the influence of parasitic capacitances on local IV characteristics for conductive AFM: Presentations held at 17th Workshop on Dielectrics in Microelectronics, June 25-27, Dresden, Germany

By Mathias Rommel, Joachim D. Jambreck, Katsuhisa Murakami, Martin Lemberger, Christoph Richter, Philip Weinzierl, Anton J. Bauer and Lothar Frey
Topics: tunneling AFM, TUNA, conductive AFM, cAFM, parasitic capacitance, displacement current, shielded AFM probes
Year: 2012
OAI identifier:
Provided by: Fraunhofer-ePrints
Download PDF:
Sorry, we are unable to provide the full text but you may find it at the following location(s):
  • (external link)
  • Suggested articles

    To submit an update or takedown request for this paper, please submit an Update/Correction/Removal Request.