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Multiple wavelengths reflectance microscopy to study the multi-physical behavior of MEMS

By N. Garraud, Y. Fedala, F. Kanoufi, G. Teissier, J.P. Roger and Fabien Amiot


International audienceIn order to characterize surface chemomechanical driving micro-electro-mechanical systems (MEMS) behavior, we propose herein a method to simultaneously obtain a full kinematic field describing the surface displacement and a map of its chemical modification from optical measurements. Using a microscope, reflected intensity fields are recorded for two different illumination wavelengths. Decoupling the wavelength-independent and -dependent contributions to the measured relative intensity changes then yields the sought fields. This method is applied to the investigation of the electro-elastic coupling, providing images of both the local surface electrical charge density and the device deformation field

Topics: [ SPI.MECA ] Engineering Sciences [physics]/Mechanics []
Publisher: Optical Society of America
Year: 2011
DOI identifier: 10.1364/OL.36.000594
OAI identifier: oai:HAL:hal-00567440v1
Provided by: Hal-Diderot

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