Multiple wavelengths reflectance microscopy to study the multi-physical behavior of MEMS

Abstract

International audienceIn order to characterize surface chemomechanical driving micro-electro-mechanical systems (MEMS) behavior, we propose herein a method to simultaneously obtain a full kinematic field describing the surface displacement and a map of its chemical modification from optical measurements. Using a microscope, reflected intensity fields are recorded for two different illumination wavelengths. Decoupling the wavelength-independent and -dependent contributions to the measured relative intensity changes then yields the sought fields. This method is applied to the investigation of the electro-elastic coupling, providing images of both the local surface electrical charge density and the device deformation field