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Improved GaN-on-Si epitaxial quality by incorporating various SixNy interlayer structures

By Tzu-Yu Wang, Sin-Liang Ou, Ray-Hua Horng and Dong-Sing Wuu
Year: 2015
DOI identifier: 10.1016/j.jcrysgro.2014.04.016
OAI identifier: oai:ir.lib.nchu.edu.tw:11455/86275
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