INVESTIGATION OF INFLUENCING DESIGN-TECHNOLOGICAL FACTORS ON STRESSED-STRAINING STATE OF SILICON ELASTIC SENSITIVE ELEMENTS IN INTEGRATED SENSORS

Abstract

The work covers the silicon elastic sensitive elements of different desings and their structures manufactured by the integrated technology methods. The aim is to investigate the influence of the design-technological factors on the quality of the silicon micromechanics elements and to perform the theoretical investigations of the stressed-straining state of the silicon elastic sensitive elements at action of the operation loads and during manufacture. The original methods for design of the stressed-straining state in the silicon micromechanics elements have been developed and confirmed experimentally with the results of the laser-interference quality control on the surface of the elastic elements and with the X-ray-structural analysis on the plant ""Dron-3M". The quality control procedure of the silicon elastic elements on base of the isovalent silicon alloying with the lead and tin additions with concentrations 2 and 2,5% accordingly relatively to the silicon has been developedAvailable from VNTIC / VNTIC - Scientific & Technical Information Centre of RussiaSIGLERURussian Federatio