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Deposicion de nitruro de silicio por PECVD Influencia de los gases precursores

By Olga Sanchez Garrido

Abstract

Centro de Informacion y Documentacion Cientifica (CINDOC). C/Joaquin Costa, 22. 28002 Madrid. SPAIN / CINDOC - Centro de Informaciòn y Documentaciòn CientìficaSIGLEESSpai

Topics: 20K - Solid-state physics, ELECTRIC ISOLATION, SILICON NITRIDE, INTEGRATED CIRCUITS, THIN FILMS, PRECURSOR GASES
Year: 1990
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Provided by: OpenGrey Repository
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