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Einsatz von mikrooptischen Sensoren in Linear-Positioniersystemen Schlussbericht

By H. Muenzer and Staufen (Germany) OWIS GmbH Feinmechanische und Optische Systemtechnik

Abstract

SIGLEAvailable from TIB Hannover: F02B195+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany)DEGerman

Topics: 09M - Computer Aided Manufacturing (CAM), MICRO INTERFEROMETER, LINEAR POSITIONING SYSTEM, LINEAR MOTOR, ACCURACY OF GUIDANCE
Year: 2000
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Provided by: OpenGrey Repository
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