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Charakterisierung und Bewertung von SiC-Technologien und -Substraten Abschlussbericht

By B. Hoffmann, A. Grochocki and Freiberg (Germany) Freiberger Compound Materials GmbH

Abstract

SIGLEAvailable from TIB Hannover: DtF QN1(75,17) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany)DEGerman

Topics: 11B - Ceramics, refractories, glasses, SUBSTRATES, TECHNOLOGIES, SILICON CARBIDES, WAFERS, CHARACTERIZATION
Year: 1999
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Provided by: OpenGrey Repository
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