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HF Species and Dissolved Oxygen on the Epitaxial Lift-Off Process of GaAs Using AlAsP Release Layers

By A.T.J. van Niftrik, J.J. Schermer, G.J. Bauhuis, P. Mulder, P.K. Larsen, M.J. van Setten, J.J. Attema, N.C.G. Tan and J.J. Kelly
Year: 2007
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