Properties of Aℓ and P Ion-Implanted Layers in ZnSe

Abstract

Low-resistivity n- and p-type layers have been produced in ZnSe by room-temperature Aℓ and P implantation, respectively, and subsequent annealing. The layers have been characterized by electrical and photoluminescence measurements as functions of ion energy and dose, and annealing time and temperature

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Last time updated on 26/05/2016

This paper was published in CORE.

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