Comparison of microtweezers based on three lateral thermal actuator configurations

Abstract

Thermal actuator-based microtweezers with three different driving configurations have been designed, fabricated and characterized. Finite element analysis has been used to model the device performance. It was found that one configuration of microtweezer, based on two lateral bimorph thermal actuators, has a small displacement (tip opening of the tweezers) and a very limited operating power range. An alternative configuration consisting of two horizontal hot bars with separated beams as the arms can deliver a larger displacement with a much-extended operating power range. This structure can withstand a higher temperature due to the wider beams used, and has flexible arms for increased displacement. Microtweezers driven by a number of chevron structures in parallel have similar maximum displacements but at a cost of higher power consumption. The measured temperature of the devices confirms that the device with the chevron structure can deliver the largest displacement for a given working temperature, while the bimorph thermal actuator design has the highest operating temperature at the same power due to its thin hot arm, and is prone to structural failure