Non-monotonous evolution of hybrid PVD–PECVD process characteristics on hydrocarbon supply

By T. Schmidtová, P. Souček, V. Kudrle and P. Vašina

Publisher: Elsevier BV

Year: 2013

DOI identifier: 10.1016/j.surfcoat.2013.05.014

OAI identifier:

Provided by: MUCC (Crossref)

Download PDF:
_{Sorry, we are unable to provide the full text but you may find it at the
following location(s):}

https://is.muni.cz/repo/112916... (external link)