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Non-monotonous evolution of hybrid PVD–PECVD process characteristics on hydrocarbon supply

By T. Schmidtová, P. Souček, V. Kudrle and P. Vašina
Publisher: Elsevier BV
Year: 2013
DOI identifier: 10.1016/j.surfcoat.2013.05.014
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Provided by: MUCC (Crossref)
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