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Germanium hut nanostressors on freestanding thin silicon membranes

By P. G. Evans, D. S. Tinberg, M. M. Roberts, M. G. Lagally, Y. Xiao, B. Lai and Z. Cai
Publisher: AIP Publishing
Year: 2005
DOI identifier: 10.1063/1.2031941
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Provided by: MUCC (Crossref)
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