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Innovative MEMS Voltage-to-Frequency Converter using Cascaded Transducers

By Amir J. Majid

Abstract

Voltage-to-frequency (v/f) is often used in communication applications such as tuning circuits and FM systems. With the wide range of Tx/Rx IC devices used in wireless telemetry, as well as the shrinkage of their sizes; a MEMS v/f converter is proposed by implementing multi-stage MEMS sensors and actuators of different types, such as voltage-to-force, force-topressure, pressure-to-capacitance and an appropriate capacitance tunable circuit to generate a pulse train of frequency

Topics: MEMS, sensors, actuators, transducers, v/f
Year: 2014
OAI identifier: oai:CiteSeerX.psu:10.1.1.412.172
Provided by: CiteSeerX
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