Abstract — First, we present a survey on modeling and control of bending piezoelectric microactuators. Second, a simple model for nonlinear piezoelectric actuators (hysteresis and creep) is presented. It is based on the multilinear approximation. This model requires low computing power and is well adapted for embedded systems. Finally, a µ-synthesis controller is implemented. Experiments show that the obtained performances are compatible with the requirements of micromanipulation tasks. Index Terms — Piezoelectric cantilever, hysteresis and creep, plurilinear modeling, µ-synthesis control. I
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