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LAMINATION AND LASER STRUCTURING FOR A DEP MICROWELL ARRAY

By E. Jung, D. Manessis, A. Neumann, Lars Böttcher, T. Braun and J. Bauer H. Reichl

Abstract

Microtechnology becomes a versatile tool for biological and biomedical applications. Microwells have been established long but remained non-intelligent up to now. Merging new fabrication techniques and handling concepts with microelectronics enables to realize intelligent microwells suitable for future improved cancer treatment. The described technology depicts the basis for the fabrication of electronically enhanced microwell. Thin aluminium sheets are structured by laser micro machining and laminated successively to obtain registration tolerances of the respective layers of <5µm. The microwells lasermachined into the laminate are with 50…350µm diameter, allowing to contain individual cells within the microwell as well as provide access holes for the layer-to-layer contacting A permeable membrane attached to the bottom of the microwell plate is used for fluid handling. The individual process steps are described and results on the microstructuring as well as on biocompatibility of the materials are given. 1

Year: 2008
OAI identifier: oai:CiteSeerX.psu:10.1.1.371.5756
Provided by: CiteSeerX
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