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High-Fidelity Rapid Prototyping Of The Real-Time Fab Operations Through Discrete Event System Modeling

By Jonghun Park, Spyros Reveliotis, Douglas Bodner, Chen Zhou, Jenn-fong Wu and Leon Mcginnis

Abstract

Traditionally, the semiconductor manufacturing industry has been driven by continuous technological advancement of the underlying production processes. Yet, as the industry matures, mere technology development is no longer sufficient. The effective deployment and exploitation of the system production capacity and operational capability become critical for competitive success. Hence, currently, there is an increasing interest towards the development of a control paradigm / framework that will allow the effective and efficient (re-)deployment and operation of contemporary fabs. The research program presented in this paper seeks to define a detailed modeling and control framework for the real-time fab operations, by exploiting and integrating emerging results in Discrete Event Systems theory. Furthermore, in addition to the development of the formal specification, the presented program will also implement the proposed fab modeling and control framework in a Web-based simulation platform, ..

Topics: flexible automation, realtime shop-floor control, Web-based simulation
Year: 2000
OAI identifier: oai:CiteSeerX.psu:10.1.1.36.5187
Provided by: CiteSeerX
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