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NANO EXPRESS A Rotating-Tip-Based Mechanical Nano-Manufacturing Process:

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Abstract

Ó The Author(s) 2010. This article is published with open access at Springerlink.com Abstract We present a rotating-tip-based mechanical nanomanufacturing technique, referred to here as nanomilling. An atomic force microscopy (AFM) probe tip that is rotated at high speeds by out-of-phase motions of the axes of a three-axis piezoelectric actuator is used as the nanotool. By circumventing the high-compliance AFM beam and directly attaching the tip onto the piezoelectric actuator, a high-stiffness arrangement is realized. The feeding motions and depth prescription are provided by a nano-positioning stage. It is shown that nanomilling is capable of removing the material in the form of long curled chips, indicating shearing as the dominant material removal mechanism. Feature-size and shape control capabilities of the method are demonstrated

Year: 2013
OAI identifier: oai:CiteSeerX.psu:10.1.1.352.327
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