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CALCULATION METHODS OF X-RAY SPECTRA: A COMPARATIVE STUDY

By B. Chyba, M. Mantler, H. Ebel and R. Svagera

Abstract

The accurate characterization of the spectral distribution of x-rays emitted from X-ray tubes is crucial in many analytical investigations. This includes the primary production of radiation within the tube target as well as absorption by the tube window and eventually applied filters. This paper discusses two calculation methods for tube spectra: an analytical program based on algorithms by H. Ebel and the MCNP software package based on Monte-Carlo code. The calculated data were also compared to measured spectra generated on a SEM with Au and Cu targets at voltages from 10kV to 30kV

Year: 2013
OAI identifier: oai:CiteSeerX.psu:10.1.1.307.5843
Provided by: CiteSeerX
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