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Performance Evaluation of Micromechanical Binary Phase-only Holographic Optical Elements

By David Winick, Bruce E. Duewer, S. Palchaudhury and Paul D. Franzon


This paper presents some results of our development and test efforts in micromachine design for optical modulation. In this work, we have developed, using a readily available surface micromachine fabrication process (MUMPs), a series of arrayed micromirror elements. These element arrays form phase-mostly spatial light modulators (SLM's), similar to Texas Instruments' flexure beam micromirror device (FBMD) [1]. Characteristics that distinguish our elements from those of TI include: integrated support posts to stabilize the elements at points beyond pull-in potential, non-metallic supporting structures to reduce diffractive noise, bistable drive capabilities without the need for transistor arrays, and greater mirror surface stability. Sections 1 and 2 describe our elements (EmBMP's). Their arrayed operation is covered in Section 3. Optical evaluations in Section 4 measure the feasibility of these devices in the application of optical interconnect, as well as bracket further discussion co..

Topics: modulators, digital micromirror devices
Year: 1997
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