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ECR-MBE Growo of GaN Using Hydrogen-Nitrogen Mixed Gas Plasma

By Yasuochiba Tsutomua Yasushi

Abstract

this paper, we have performed GaN growth with hyd3S3)qH44,#)d mixed gas plasma as a group V source using ECR-MBE [7]and investigated the effect of hyd,,55 on the GaN growth rate. The surfac

Year: 2000
OAI identifier: oai:CiteSeerX.psu:10.1.1.29.7799
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